Success Stories in the Semiconductor Industry
Semiconductor ceramics product cases
Explore other high-performance ceramics we have developed for the semiconductor industry to meet the needs of different application scenarios
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Wafer handling fingers, also known as end-effector, ceramic robot arm, etc., are mainly used in semiconductor equipment...
Learn moreCase background and challenges
As semiconductor manufacturing processes continue to advance, the demand for precision, stability and reliability of production equipment is increasing. Our customer, a leading global manufacturer of semiconductor equipment, faces a range of problems caused by the use of conventional metal parts in extreme environments (high temperature, high corrosion, high precision).
半导体器件对晶圆有非常严格的要求，只有近乎完美的晶片才能避免对器件非常有害的电学和机械缺陷，因此需要对晶片进行整型、切片、研磨、清洗等多个步骤。在这些工序里，晶片都需要一个可以安置并固定的工作台，采用陶瓷真空吸盘，也即一种通过高温烧结在材料内部生成大量彼此连体或闭合的均匀实心或者真空体陶瓷，来通过真空吸力将半导体片、玻璃基板材料等工作物固定住。
- Insufficient thermal stability in high temperature environments, leading to a decrease in equipment accuracy
- Chemical corrosion leads to short component life, increasing maintenance costs and downtime
- Metal Particle Contamination Affects Semiconductor Yield
- Sub-micron component accuracy required
Wafer Handling Finger WAFER HANDLING FINGER
PRODUCT FEATURES
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High air tightness
High airtightness
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Resistant to corrosion, abrasion and high temperature
Resistant to corrosion, wear, and high temperatures
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Insulation/anti-static
Insulation/anti-static
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High machining precision
High machining precision
Customized ceramic solutions
Based on customer needs, we have developed a series of high-precision ceramic components with advanced material formulations and precision machining processes to provide ideal solutions for semiconductor manufacturing.
High Temperature Ceramic Wafer Carriers
The use of silicon nitride-based ceramic materials can maintain stable dimensions at high temperatures of up to 1200°C, with a very low coefficient of thermal expansion, effectively preventing wafer deformation and improving yields.
Corrosion-resistant ceramic reaction chamber parts
The use of high-purity alumina and zirconia composite materials, with excellent chemical inertness, effective resistance to plasma corrosion, extending the service life of more than 3 times.
High Precision Ceramic Positioning Assemblies
Through precision grinding and polishing process, it realizes ±0.5μm dimensional accuracy and Ra<10nm surface roughness to meet the positioning requirements of advanced processes.
Semiconductor Manufacturing Process Flow and Ceramic Applications
We provide specialized ceramic solutions for key process steps in semiconductor manufacturing to ensure stability and reliability of each process.
| process | Equipment for the application of ceramic products | Advanced Ceramic Material Components | Product Main Material Type |
|---|---|---|---|
| photolithography | photolithography | Ceramic workpiece tables, guides, mirrors, ceramic suction cups, arms, water-cooled trays, suction cups | Alumina, Silicon Nitride, Silicon Carbide |
| etch | etching machine | Rings and cylinders, airflow guides, load-bearing fixation, grips and spacers, guides, modules | Zirconia, Alumina, Silicon Carbide |
| Thin Film Deposition | PVD, CVD and ALD equipment | Rings and cylinders, airflow guides, load-bearing fixation, grips and shims, modules | Zirconia, Alumina, Silicon Carbide |
| ion implantation | Ion implantation equipment | Rings and cylinders, load-bearing fixed type, hand claw gasket type | Zirconia, Alumina, Silicon Carbide |
| Gluing and developing | Photolithography, coating and developing equipment | Load-bearing fixed type, hand claw spacer type | Alumina, Silicon Carbide |
| Oxidation/diffusion, annealing, alloying, etc. | Oxidizing diffusion equipment | Load-bearing fixing type, hand gripper spacer type, module | aluminum oxide |
Application of ceramic components in critical equipment
photolithography
Core ceramic components: precision positioning table, reflector system, vacuum suction cups, requiring extremely high flatness and thermal stability.
etching machine
Core ceramic components: reaction chamber walls, gas distributors, electrode bases, require excellent corrosion resistance and high temperature stability.
Thin Film Deposition Equipment
Core ceramic components: crucibles, evaporation sources, gas nozzles, require high purity, low volatility and excellent thermal cycle stability.
Rigorous project implementation process
From requirement analysis to final delivery, we follow a strict quality management system to ensure that every ceramic component meets our customers' high standards.
Requirements analysis and material selection
Our team of engineers communicates with customers in depth, analyzes the usage environment and technical requirements, selects the most suitable combination of ceramic materials, conducts preliminary performance evaluation and simulation tests.
Precision Mold Design and Manufacturing
Based on 3D modeling and finite element analysis, we design high-precision molds and use CNC machining technology to ensure mold precision and lay the foundation for subsequent molding process.
Forming and sintering processes
Isostatic molding technology is used to ensure uniformity of the density of the billet, and high temperature sintering in a strictly controlled atmosphere furnace ensures that the material achieves optimum performance.
Precision machining and surface treatment
The use of advanced CNC machining centers and ultra-precision grinding equipment, together with proprietary processes, enables sub-micron precision machining and ensures that surface quality meets requirements.
Strict quality testing
A full range of inspections are carried out by advanced equipment such as three-dimensional coordinate measurement, laser interferometer, scanning electron microscope, etc., to ensure that each component meets the technical specifications.
Project results and client benefits
Customer Feedback
The high-precision ceramic parts provided by Xiayang Ceramics have completely solved the problems of material corrosion and unstable precision that we faced in the semiconductor manufacturing process. The frequency of equipment maintenance has been significantly reduced, and production efficiency and product yields have been greatly improved. We are impressed by their professional technical support and customized services.
Engineer
R&D Director | A Semiconductor Equipment Manufacturer
Ceramic core products for semiconductors
We provide high-precision, high-performance ceramic core components for semiconductor manufacturing to ensure the stability and reliability of the production process.
Ceramic Vacuum Suction Cups
Ceramic vacuum chuck is a special vacuum chuck made of porous ceramic material with high porosity, high strength, high flatness, etc. It is widely used in semiconductor wafer cutting, grinding, testing and other processes.
Core performance characteristics:
- Self-tightness testing:Turn off the vacuum air source, negative pressure -85Kpa to -80Kpa, the length of time up to more than 60s
- Wafer adsorption detection:Turn off the vacuum air source, negative pressure -80Kpa to -25Kpa, the length of time up to more than 35s
- High precision:Excellent flatness and parallelism for sub-micron positioning requirements
- Airtight:Uniform pore distribution to ensure stable vacuum adsorption effect
- Good heat resistance:Can work stably in high temperature environment without deformation and aging
- Controlled surface resistivity:Effectively prevents static buildup and protects sensitive wafer surfaces
Ceramic parts for semiconductor equipment
The company's advanced ceramic material parts for semiconductor equipment are mainly used in the chamber, some of which are in direct contact with the wafers, and are key precision parts in integrated circuit manufacturing.
Application Features:
- High purity materials, no metal ion contamination, ensuring a pure environment for wafer processing
- Excellent chemical resistance to a wide range of process gases and plasmas
- Extremely low particle shedding rate to meet the requirements of ultra-clean room environments
- Precise dimensional control to meet sub-micron assembly tolerances
Ceramic robot arm
It is used for the transfer of wafers and LED production throughout the process, effectively preventing scratches on wafers as well as surface contamination. The ceramic robot arm is made of advanced ceramic materials with excellent rigidity, lightweight characteristics and chemical stability.
Key Strengths:
Advanced Precision Manufacturing
advancied precision manufacturing
Xayang has over 20 years of finishing experience!
We are equipped with a large number of machining equipment, including various types of high-precision machining equipment at home and abroad, and are able to handle the machining of various complex workpieces.
Raw material preparation
RAW MATERIAL PREPARATION
Xia Yang has its own material development line, which can produce sintering according to different materials and sizes!
XY has its own material R&D production line and can conduct production and sintering according to different materials and sizes!
Precision testing
PRECISION INSPECTION
The company has IQC, IPQC, OQC departments, and has a number of imported high-precision testing equipment to meet a variety of industry-standard testing requirements, such as Zeiss three-dimensional, CCD, SEM and so on.
XY has IQC, IPQC, and OQC departments, and possesses multiple imported high-precision testing equipment, such as Zeiss Coordinate Measuring Machine ( CMM, CCD, SEM, etc., which can meet various industry standard testing requirements. CMM), CCD, SEM, etc., which can meet various industry standard testing requirements.
Our Advantages
our company's advantages
Research Strength
The company has a ceramic materials industry well-known professor and doctor led by the R & D team, more than 30 professional and technical personnel, but also access to scientific research institutes and schools and enterprises of the strong R & D power to support.
XY has renowned professors and Ph.D. holders in the ceramic materials industry, more than 30 professional staff, and strong R&D support from research institutes, colleges, and enterprises. institutes, colleges, and enterprises.
Powder Formulation
With many material doctors and rich experience in application cases, we can develop formulas to meet customers' needs.
With multiple Ph.D. holders in materials science and extensive experience in application cases, we are capable of developing formulations tailored to meet customer needs.
Forming and sintering
We have a wide range of molding and sintering equipment, which can be used for molding and sintering corresponding to different material requirements.
Equipped with various molding and sintering equipment, we can perform corresponding molding and sintering according to different material requirements.
Finishing Strength
Accumulated more than twenty years of experience in precision machining, each process processing equipment is complete, and can be customized according to the depth of customer requirements.
With more than 20 years of precision machining experience and complete processing equipment for various procedures, we can deeply customize solutions according to customers' requirements.
Quality Assurance
The company has IQC, IPQC, OQC departments and has a number of high-precision testing equipment to strictly control the quality, can meet a variety of industry standard testing requirements.
XY has IQC, IPQC, and OQC departments, and possesses multiple pieces of high-precision testing equipment to strictly control quality and meet various industry-standard testing requirements.
complete industrial chain
The company has a complete closed-loop industrial chain, from formula → molding → sintering → precision manufacturing → high clean cold surface treatment → program testing are completed by our company.
XY boasts a complete closed-loop industrial chain, where all processes from formula development, molding, sintering, precision manufacturing, high-precision manufacturing, to solution testing are completed in-house. cleanliness surface treatment, to solution testing are completed in-house.
Need a semiconductor ceramic solution?
Whatever your challenge, we have a customized ceramic solution for you. Contact us today to start a partnership!
Consultation on customized solutions
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