Customer Cases
We offer a full range of high-performance ceramic materials and customized machined parts to meet the special requirements of different industries for hardness, wear resistance, high temperature resistance, and other special requirements.
Ceramic Vacuum Suction Cups for Semiconductor Equipment
Ceramic vacuum chuck is a special vacuum chuck made of porous ceramic material with high porosity, high strength, high flatness, etc. It is widely used in semiconductor wafer cutting, grinding, testing and other processes.
Case overview
Product Features
1、High precision
2、Good air tightness
3、Uniform adsorption
4、Resistant to abrasion and corrosion
▲It can achieve flatness of 0.002mm and parallelism of 0.003mm.
| makings | Pore size (um) | porosity | Differential pressure (bar) | resistivity | color |
| aluminum oxide | 5-50 | 15-45% | 35 | 1×1011 | Dark Gray/Earth Yellow |
| silicon carbide | 10-50 | 15-45% | 30 | 1×108 | ferrous |
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