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Wafer handling fingers, also known as end-effector, ceramic robot arm, etc., mainly in the semiconductor equipment to play the role of transportation and handling, it is equivalent to the semiconductor equipment this robot [...].
Case overview
Wafer handling fingers, also known as end-effector, ceramic robotic arm, etc., mainly in the semiconductor equipment to play the role of transportation and handling, which is equivalent to the semiconductor equipment, the robot's hand, responsible for handling the wafer silicon wafers to the designated location.
Since silicon wafers are extremely susceptible to contamination by other substances, they are generally handled in a vacuum environment. In this environment, most of the material handling finger is generally difficult to complete the work, the production of handling finger materials need to be high temperature, wear-resistant, and hardness needs to be very high. Advanced ceramic materials can meet these conditions, the general ceramic handling fingers are mainly three kinds, one is alumina ceramic mechanical handling fingers, the other two are black ceramic and composite ceramic handling fingers. These ceramic materials are equipped with high density, high hardness, high wear-resistant physical properties, as well as good heat resistance, excellent mechanical strength, high temperature environment still has good insulation, good corrosion resistance and other physical properties, is used to make semiconductor equipment handling fingers of the excellent materials.
At present, the ceramic handling fingers produced by our company are suitable for a variety of high-performance requirements of semiconductor equipment, and its production of ceramic products have been recognized by the majority of customers.
Wafer handling fingers, also known as end-effector, ceramic robotic arm, etc., mainly in the semiconductor equipment to play the role of transportation and handling, which is equivalent to the semiconductor equipment, the robot's hand, responsible for handling the wafer silicon wafers to the designated location.
Since silicon wafers are extremely susceptible to contamination by other substances, they are generally handled in a vacuum environment. In this environment, most of the material handling finger is generally difficult to complete the work, the production of handling finger materials need to be high temperature, wear-resistant, and hardness needs to be very high. Advanced ceramic materials can meet these conditions, the general ceramic handling fingers are mainly three kinds, one is alumina ceramic mechanical handling fingers, the other two are black ceramic and composite ceramic handling fingers. These ceramic materials are equipped with high density, high hardness, high wear-resistant physical properties, as well as good heat resistance, excellent mechanical strength, high temperature environment still has good insulation, good corrosion resistance and other physical properties, is used to make semiconductor equipment handling fingers of the excellent materials.
At present, the ceramic handling fingers produced by our company are suitable for a variety of high-performance requirements of semiconductor equipment, and its production of ceramic products have been recognized by the majority of customers.